The nitrous oxide (N₂O) production and purification equipment was successfully commissioned on December 10, 2023. The owner, Suzhou Innovator Materials Co., Ltd., is a company specializing in the R&D, manufacturing, and sales of electronic specialty gases, including semiconductor gases, material R&D, and localization projects. Its products are mainly exported to Europe, America, Malaysia, Thailand, and other regions.
Phase I of the project covers 28680㎡, with an annual output of 6,000 tons of electronic grade nitrous oxide and 80 tons of electronic grade mixed gas. The project currently holds the largest production capacity in China, achieving complete localization, thereby accelerating the rapid development of the national integrated circuit industry.
The Phase II expansion project, designated as a provincial key project, will occupy approximately 73370㎡and will build an R&D and testing center. It will primarily engage in the R&D and testing of mixed gases, fluorocarbon gases, precursor gases, and 37 types of high-purity specialty electronic gases above 5N purity.
