Hanturbo Technology (Zhejiang) Co., Ltd. is one of the leading manufacturers and suppliers of electronic gas purification equipment in China. We specialize in providing high quality custom service with competitive price. If you're going to buy discount electronic gas purification equipment, welcome to get quotation from our factory.
The high-purity electronic gas purification equipment is a core supporting equipment for high-end manufacturing fields such as semiconductor, photovoltaic, and display panels. It is specifically designed to remove trace impurities from electronic-grade gases. This equipment adopts advanced deep purification technology, which can raise the purity of the gas to above 99.9999%, ensuring stable and reliable production processes and superior product quality.
Details
As a key link in the semiconductor manufacturing industry chain, the performance of the high-purity electronic gas purification equipment directly determines the yield and reliability of chip manufacturing. This equipment is specifically developed for the deep purification of electronic-grade special gases (such as nitrous oxide, boron trichloride, trimethylsilane, propene, octafluorocyclobutane, hexafluoroethane, carbon dioxide, carbon monoxide, hydrogen bromide, etc.). It can effectively remove moisture, oxygen, particulate matter, metal ions, and other harmful impurities from the gas, raising the purity of the gas to ultra-high purity levels (≥ 99.9999%), meeting the stringent requirements of advanced processes such as 7nm and below for gas quality.
Technical Advantages
Ultra-high purification efficiency: The purity of the purified gas can reach 99.9999%(6N level), and the impurity content is lower than the industry standard.
Intelligent control: Adopting PLC full automatic control system, supporting remote monitoring, fault self-diagnosis, and automatic alarm.
Modular design: Can be flexibly configured according to customer requirements, convenient for maintenance and upgrade.
Energy-saving and environmental protection: Low energy consumption operation, in line with the concept of green manufacturing.
Long-term stable operation: The life of the core purification material is long, and the continuous operation cycle can reach 2-3 years or more.
Quality Assurance
Material Selection: All parts in contact with the gas are made of 316L EP-grade stainless steel or higher grade materials, with the inner wall being electro-polished to Ra≤0.25μm.
Strict Testing: Each device is subject to multiple tests, including helium mass spectrometry leak detection, particle counting, and moisture/oxygen analysis, before shipment.
International Standards: Compliant with SEMI, GB/T, ISO, and other domestic and international standard specifications.
Traceability Management: A complete quality traceability system is established, with critical components traceable back to the raw material batch.
Solutions to Customer's Concerns
| Customer Focus | Our Solutions |
| Gas purity does not meet the standard | Customized purification solutions to ensure purity meets process window requirements |
| Poor equipment stability | Redundant design + double backup of key components, MTBF≥80000 hours |
| High maintenance cost | Long-life consumables + online regeneration function, reducing operating costs |
| Large occupied area | Compact integrated design, saving 30% space compared to traditional equipment |
| Safety Risk | Multiple safety interlocks + explosion-proof design, compliant with SEM S2/S8 safety standards |
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