China faces a critical technology gap in specialty gases for Very Large Scale Integration (VLSI) and Ultra Large Scale Integration (ULSI) applications, with gases exceeding 6N purity (99.9999%) entirely dependent on imports.
To address the surging demand for electronic specialty gases across semiconductor manufacturing, electronics production, and photovoltaic industries, our company has established a strategic industry-university partnership with Zhejiang University in recent years. This collaboration focuses on the development of 6N-grade electronic gases, bridging domestic technological shortfalls and resolving this critical challenge.
In June 2025, our company established the Zhejiang University Specialty Gas & Equipment Innovation Team, dedicated to providing semiconductor suppliers with advanced production systems for electronic gas products.
Through collaborative research and joint technological breakthroughs, we have successfully developed production and purification systems for a comprehensive portfolio of high-purity specialty gases, including: Nitrous Oxide (N₂O), Boron Trichloride (BCl₃), Trimethylsilane (3MS), Propylene (C₃H₆), Octafluorocyclobutane (C₄F₈), Hexafluoroethane (C₂F₆), Hydrogen Bromide (HBr) etc.
Additionally, we have achieved major breakthroughs in Air Separation Unit (ASU) technology, realizing high argon recovery rates and low-energy operation, significantly enhancing overall system efficiency and economic performance.
To address the surging demand for electronic specialty gases across semiconductor manufacturing, electronics production, and photovoltaic industries, our company has established a strategic industry-university partnership with Zhejiang University in recent years. This collaboration focuses on the development of 6N-grade electronic gases, bridging domestic technological shortfalls and resolving this critical challenge.
In June 2025, our company established the Zhejiang University Specialty Gas & Equipment Innovation Team, dedicated to providing semiconductor suppliers with advanced production systems for electronic gas products.
Through collaborative research and joint technological breakthroughs, we have successfully developed production and purification systems for a comprehensive portfolio of high-purity specialty gases, including: Nitrous Oxide (N₂O), Boron Trichloride (BCl₃), Trimethylsilane (3MS), Propylene (C₃H₆), Octafluorocyclobutane (C₄F₈), Hexafluoroethane (C₂F₆), Hydrogen Bromide (HBr) etc.
Additionally, we have achieved major breakthroughs in Air Separation Unit (ASU) technology, realizing high argon recovery rates and low-energy operation, significantly enhancing overall system efficiency and economic performance.
